Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453696 | Dual endpoint detection for advanced phase shift and binary photomasks | — | 2019-10-22 |
| 10170280 | Plasma reactor having an array of plural individually controlled gas injectors arranged along a circular side wall | Madhavi R. Chandrachood, Khiem K. Nguyen, Richard Lewington, Ibrahim M. Ibrahim, Sheeba J. Panayil +1 more | 2019-01-01 |