Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10309012 | Wafer carrier for reducing contamination from carbon particles and outgassing | Yongkee Chae, Jiunn Benjamin Heng, Zheng Xu | 2019-06-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10309012 | Wafer carrier for reducing contamination from carbon particles and outgassing | Yongkee Chae, Jiunn Benjamin Heng, Zheng Xu | 2019-06-04 |