Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10455642 | Rapid thermal processing chamber with linear control lamps | Preetham Rao | 2019-10-22 |
| 10234772 | Overlay error correction | Mangesh Ashok BANGAR, Bruce E. Adams, Kelly E. Hollar, Huixiong Dai, Jaujiun Chen | 2019-03-19 |