Charles P. Tung

AM AMD: 1 patents #309 of 860Top 40%

📍 Westford, MA: #74 of 199 inventorsTop 40%

🗺 Massachusetts: #5,264 of 14,267 inventorsTop 40%

Overall (2019): #506,696 of 560,194Top 95%

Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
10283437	Metal density distribution for double pattern lithography	Richard T. Schultz, Omid Rowhani	2019-05-07