Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438823 | Substrate treatment device | — | 2019-10-08 |
| 10312117 | Apparatus and radiant heating plate for processing wafer-shaped articles | Hongbo Si, Bridget Hill, Butch Berney | 2019-06-04 |