Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312059 | Ring member with air holes and substrate processing system including the same | Taekyun Kang, JungHwan Um, Changwon Choi | 2019-06-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312059 | Ring member with air holes and substrate processing system including the same | Taekyun Kang, JungHwan Um, Changwon Choi | 2019-06-04 |