Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10239783 | Method of producing glass substrate and glass substrate | Nobutaka Aomine, Yuki Aoshima, Hirotomo Kawahara, Kazunobu Maeshige | 2019-03-26 |
| 10241390 | Reflective mask blank and process for producing the reflective mask blank | — | 2019-03-26 |
| 10204767 | Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source | Hirotomo Kawahara, Nobutaka Aomine, Kazunobu Maeshige, Yuki Aoshima | 2019-02-12 |