Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438778 | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition | — | 2019-10-08 |
| 10242846 | Hollow cathode ion source | John Chambers | 2019-03-26 |