Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10150675 | Method for producing polycrystalline silicon | Friedrich Popp | 2018-12-11 |
| 9988277 | Fluidized bed reactor and method for producing granular polysilicon | Dirk Weckesser | 2018-06-05 |
| 9962745 | Cleaning of CVD production spaces | Friedrich Popp | 2018-05-08 |