SC

Shengwu Chang

VA Varian Semiconductor Equipment Associates: 2 patents #25 of 139Top 20%
🗺 Massachusetts: #2,224 of 12,682 inventorsTop 20%
Overall (2018): #103,825 of 503,207Top 25%
2
Patents 2018

Issued Patents 2018

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10074514 Apparatus and method for improved ion beam current Frank Sinclair, Alexandre Likhanskii, Philip Layne 2018-09-11
9934928 Source housing assembly for controlling ion beam extraction stability and ion beam current Jeff Burgess, William Leavitt, Michael St Peter, Matt Mosher, Joe Olson +1 more 2018-04-03