Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157764 | Thermal shield for electrostatic chuck | David J. Chipman | 2018-12-18 |
| 9953849 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh | 2018-04-24 |