Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101652 | Exposure method, method of fabricating periodic microstructure, method of fabricating grid polarizing element and exposure apparatus | Kentaro Nomoto, Yohei NAWAKI | 2018-10-16 |
| 9983480 | Method of manufacturing a structure on a substrate | — | 2018-05-29 |