Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131680 | Group 4 metal element-containing alkoxy compound, preparing method thereof, precursor composition including the same for film deposition, and method of depositing film using the same | Won Seok Han, Myeong-Ho Park | 2018-11-20 |
| 10014089 | Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition | Won Seok Han | 2018-07-03 |
| 10005795 | Group 4 metal element-containing compound, method of preparing the same, precursor composition including the same for depositing film, and method of depositing film using the same | Won Seok Han, Myeong-Ho Park | 2018-06-26 |
| 9957614 | Ruthenium compound, preparation method therefor, precursor composition for film deposition containing same, and method for depositing film by using same | Won Seok Han, So Young Kim | 2018-05-01 |