Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096565 | Method for fabricating glass substrate package | — | 2018-10-09 |
| 9951435 | Coating packaged chamber parts for semiconductor plasma apparatus | Xiaoming He, Lei Wan, Zhaoyang Xu, Hanting Zhang | 2018-04-24 |