Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074172 | Device and method for making dimensional measurements on multilayer objects such as wafers | Sylvain Perrot | 2018-09-11 |
| 10043266 | Method and device for controllably revealing structures buried in objects such as wafers | Sylvain Perrot | 2018-08-07 |
| 9958261 | Device and method for surface profilometry for the control of wafers during processing | — | 2018-05-01 |
| 9897927 | Device and method for positioning a photolithography mask by a contactless optical method | Guenael Ribette | 2018-02-20 |