Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972479 | Target assembly | Shinya Nakamura, Yoshihiro Ikeda, Yuusuke Miyaguchi | 2018-05-15 |
| 9960018 | RF sputtering apparatus and sputtering method | Shinya Nakamura | 2018-05-01 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972479 | Target assembly | Shinya Nakamura, Yoshihiro Ikeda, Yuusuke Miyaguchi | 2018-05-15 |
| 9960018 | RF sputtering apparatus and sputtering method | Shinya Nakamura | 2018-05-01 |