YM

Yasuhiro Morikawa

UL Ulvac: 1 patents #21 of 58Top 40%
Overall (2018): #187,589 of 503,207Top 40%
1
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
10079133 Plasma processing device Takahide Murayama, Toshiyuki Sakuishi 2018-09-18