Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9856563 | Micro-balance sensor integrated with atomic layer deposition chamber | Joseph A. Libera, Jeffrey W. Elam, Shannon Riha | 2018-01-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9856563 | Micro-balance sensor integrated with atomic layer deposition chamber | Joseph A. Libera, Jeffrey W. Elam, Shannon Riha | 2018-01-02 |