Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10118191 | Film forming apparatus | Takahiro Shirahata | 2018-11-06 |
| 10121931 | Film formation device | Takahiro Shirahata, Akio Yoshida | 2018-11-06 |
| 10016785 | Oxide film deposition method and oxide film deposition device | Takahiro Shirahata, Takahiro Hiramatsu | 2018-07-10 |
| 9954135 | Solar cell manufacturing method | Takahiro Hiramatsu, Takahiro Shirahata, Toshiyuki Kawaharamura, Shizuo Fujita | 2018-04-24 |