Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106399 | Multi-layer single chip MEMS WLCSP fabrication | Tzu-Feng Chang | 2018-10-23 |
| 9975759 | Method and structure of MEMS PLCSP fabrication | Tzu-Feng Chang | 2018-05-22 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106399 | Multi-layer single chip MEMS WLCSP fabrication | Tzu-Feng Chang | 2018-10-23 |
| 9975759 | Method and structure of MEMS PLCSP fabrication | Tzu-Feng Chang | 2018-05-22 |