YW

Yukihiro Wakamoto

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #176,283 of 503,207Top 40%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10112210 Coating processing apparatus for coating liquid on substrate moving in a horizontal direction with slit-shaped ejecting port moving in a vertical direction 2018-10-30