Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081090 | Method of manufacturing an upper electrode of a plasma processing device | Tsuguo KITAJIMA | 2018-09-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081090 | Method of manufacturing an upper electrode of a plasma processing device | Tsuguo KITAJIMA | 2018-09-25 |