Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020172 | Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method | Mitsunori Ohata, Hidetoshi Kimura, Kiyoshi Maeda, Jun Hirose | 2018-07-10 |