Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9995378 | Drive device and substrate processing system | Toshinao Kato | 2018-06-12 |
| 9947564 | Conveyance base and conveyance system | Takehiro Nakayama | 2018-04-17 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9995378 | Drive device and substrate processing system | Toshinao Kato | 2018-06-12 |
| 9947564 | Conveyance base and conveyance system | Takehiro Nakayama | 2018-04-17 |