TY

Terutaka Yamaoka

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #216,942 of 503,207Top 45%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9978619 Substrate processing apparatus, substrate processing method and storage medium Naoki Tajima, Koji Motoi 2018-05-22