TY

Tatsuya Yamaguchi

TL Tokyo Electron Limited: 2 patents #120 of 733Top 20%
Overall (2018): #97,267 of 503,207Top 20%
2
Patents 2018

Issued Patents 2018

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9909809 Heat treatment apparatus and method of controlling the same Goro Takahashi, Takanori Saito, Wenling Wang, Koji Yoshii 2018-03-06
9905442 Heat treatment apparatus, heat treatment method, and program Koji Yoshii, Masafumi Shoji 2018-02-27