Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9947864 | Method for etching object to be processed | Song yun Kang | 2018-04-17 |
| 9911596 | Modification processing method and method of manufacturing semiconductor device | Yusuke Muraki, Kazuaki Nishimura | 2018-03-06 |