TA

Tadashi Aoto

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #223,550 of 503,207Top 45%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10153138 Plasma etching apparatus Daisuke Hayashi 2018-12-11