Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984904 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Tsunenaga Nakashima | 2018-05-29 |
| 9984905 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Tsunenaga Nakashima | 2018-05-29 |