Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074192 | Substrate inspection apparatus and control method thereof | Kenta Saiki | 2018-09-11 |
| 10006941 | Position accuracy inspecting method, position accuracy inspecting apparatus, and position inspecting unit | Kenta Saiki, Toshihiko Tanaka, Muneaki Tamura, Kazuhiko Koshimizu | 2018-06-26 |