SD

Shigeki Doba

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #242,267 of 503,207Top 50%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10090161 Plasma etching apparatus and plasma etching method Satoshi Yamada 2018-10-02