Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133265 | Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends | Aaron Archer Waterman, Yuichiro Morozumi, Tetsushi Ozaki, Sukesh Janubhai Patel | 2018-11-20 |