MT

Mitsuhiro Tomura

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
📍 Rifu, JP: #94 of 272 inventorsTop 35%
Overall (2018): #298,927 of 503,207Top 60%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9925571 Method of cleaning substrate processing apparatus Akihiro Kikuchi 2018-03-27