Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10094019 | Film forming apparatus | Daisuke Toriya, Eiichi KOMORI | 2018-10-09 |
| 10096495 | Substrate processing apparatus | Toshiki HINATA | 2018-10-09 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10094019 | Film forming apparatus | Daisuke Toriya, Eiichi KOMORI | 2018-10-09 |
| 10096495 | Substrate processing apparatus | Toshiki HINATA | 2018-10-09 |