Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9970111 | Substrate processing apparatus having ground electrode | Hiroyuki Matsuura, Yutaka Motoyama, Koichi Shimada, Takeshi Ando | 2018-05-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9970111 | Substrate processing apparatus having ground electrode | Hiroyuki Matsuura, Yutaka Motoyama, Koichi Shimada, Takeshi Ando | 2018-05-15 |