Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134619 | Connecting mechanism and connecting method of substrate container | Norihiko Tsuji | 2018-11-20 |
| 10128134 | Substrate transfer method and processing system | — | 2018-11-13 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134619 | Connecting mechanism and connecting method of substrate container | Norihiko Tsuji | 2018-11-20 |
| 10128134 | Substrate transfer method and processing system | — | 2018-11-13 |