Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9857124 | Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus | Mitsuru Obara, Keishi Shionaga, Masahiro Kobayashi, Norio Baba, Hiroshi Kikuchi | 2018-01-02 |