HY

Hironori Yagi

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #396,242 of 503,207Top 80%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10036090 Trap mechanism, exhaust system, and film formation device Eiichi KOMORI 2018-07-31