Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115611 | Substrate cooling method, substrate transfer method, and load-lock mechanism | Shinya Okano | 2018-10-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115611 | Substrate cooling method, substrate transfer method, and load-lock mechanism | Shinya Okano | 2018-10-30 |