Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133266 | Conveyance robot replacement apparatus and conveyance robot replacement method | Masahiro DOGOME, Hiroshi IKARI, Toshiaki TOYOMAKI, Takehiro Shindo | 2018-11-20 |
| 10010913 | Purging apparatus and purging method for substrate storage container | Seiichi Kaise, Shigeki Amemiya | 2018-07-03 |