Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10043637 | Plasma processing apparatus and particle adhesion preventing method | Yoshinori Suzuki | 2018-08-07 |
| 9953862 | Plasma processing method and plasma processing apparatus | Yen-Ting Lin, Chih-Hsuan Chen, Ju-Chia Hsieh, Shigeru Yoneda | 2018-04-24 |