Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141164 | Plasma processing apparatus and plasma processing method | Yasuharu Sasaki, Manabu Iwata | 2018-11-27 |
| 9953854 | Method of adsorbing target object on mounting table and plasma processing apparatus | Yasuharu Sasaki | 2018-04-24 |