Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10077865 | Magnet assisted stage for vibration and heat reduction in wafer scanning | Deokkyun D. Yoon | 2018-09-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10077865 | Magnet assisted stage for vibration and heat reduction in wafer scanning | Deokkyun D. Yoon | 2018-09-18 |