Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131539 | Method for forming micro-electro-mechanical system (MEMS) device structure | Chin-Han Meng, Chih-Hsien Hsu, Chia-Chi Chung, Wen-Chih Chen, Chen-Huang Huang +4 more | 2018-11-20 |
| 9997336 | Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP | Chin-Han Meng, Jr-Sheng Chen, Yin-Tun Chou, Chih-Hua Chan, Lin-Ching Huang | 2018-06-12 |