Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134896 | Cyclic deposition etch chemical vapor deposition epitaxy to reduce EPI abnormality | Chun Hsiung Tsai, Sheng-Wen Yu, Yi-Fang Pai | 2018-11-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134896 | Cyclic deposition etch chemical vapor deposition epitaxy to reduce EPI abnormality | Chun Hsiung Tsai, Sheng-Wen Yu, Yi-Fang Pai | 2018-11-20 |