Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163669 | Metrology system and measurement method using the same | Ming-Hua Yu, Yi-Hung Lin, Jet-Rung Chang | 2018-12-25 |
| 10049886 | System and method for damage reduction in light-assisted processes | Yi-Hung Lin, Sheng-Shin Lin, Yu-Ting Huang, Tze-Liang Lee | 2018-08-14 |
| 9947540 | Pre-deposition treatment and atomic layer deposition (ALD) process and structures formed thereby | Cheng-Yen Tsai, Da-Yuan Lee, JoJo Lee, Ming-Hsing Tsai, Hsueh Wen Tsau +2 more | 2018-04-17 |