Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103322 | Method to remove sidewall damage after MTJ etching | Zhongjian Teng, Tom Zhong | 2018-10-16 |
| 10069064 | Memory structure having a magnetic tunnel junction (MTJ) self-aligned to a T-shaped bottom electrode, and method of manufacturing the same | Tom Zhong, Zhongjian Teng | 2018-09-04 |
| 9972777 | MTJ device process/integration method with pre-patterned seed layer | Tom Zhong, Zhongjian Teng, Dongna Shen | 2018-05-15 |
| 9887350 | MTJ etching with improved uniformity and profile by adding passivation step | Dongna Shen, Yu-Jen Wang | 2018-02-06 |
| 9880473 | Surface treatment method for dielectric anti-reflective coating (DARC) to shrink photoresist critical dimension (CD) | Tom Zhong | 2018-01-30 |