Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10112826 | Method for forming micro-electro-mechanical system (MEMS) device structure | Chih-Hang Chang, I-Shi Wang | 2018-10-30 |
| 9884755 | Rough anti-stiction layer for MEMS device | Yu-Jui Chen, I-Shi Wang, Ren-Dou Lee | 2018-02-06 |