Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163609 | Plasma generation for ion implanter | Tsung-Min Lin, Ming-Hsing Li, Fang-Chi Chien, Chao-Li Shih | 2018-12-25 |
| 9970105 | Method for sealing processing module | Chun-Ta Chen, Cheng-Chieh Chen, Yeh-Chieh Wang, Jeng-Yann Tsay, Shyue-Shin Tsai +1 more | 2018-05-15 |