MS

Masateru Sato

SC Sumitomo Heavy Industries Ion Technology Co.: 1 patents #3 of 10Top 30%
Overall (2018): #313,077 of 503,207Top 65%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10030304 Ion implantation apparatus and method of cleaning ion implantation apparatus Takayuki Nagai 2018-07-24